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Eberhard Manske

Invited Speakers

Eberhard Manske
Prof. Dr.-Ing. habil. Eberhard Manske,
Chair of the Department of Precision Metrology, Technical University Ilmenau

Title of speech:

Multisensor approach and multiscale measurement strategies in micro/nano measurement technology

 

Abstract

More and more flexible data acquisition is necessary in high-precision metrology of micro- and nanostructured parts with increasing complexity and 3D-dimensionality of the geometry. Sensing of most various surfaces and structures with nanometre resolution is an important issue. At once, a Nanopositioning and Nanomeasuring Machine with sub-nanometre resolution in combination with a measuring range of several millimetres enables multiscale measurement strategies. Because of different capabilities of divers optical probes among each other, but also of tactile and atomic force sensors a multisensor approach provide exceptional advantages in micro/nano measurement technology.