Prof. Dr.-Ing. habil. Eberhard Manske,
Chair of the Department of Precision Metrology, Technical University Ilmenau
Title of speech:
Multisensor approach and multiscale measurement strategies in micro/nano measurement technology
More and more flexible data acquisition is necessary in high-precision metrology of micro- and nanostructured parts with increasing complexity and 3D-dimensionality of the geometry. Sensing of most various surfaces and structures with nanometre resolution is an important issue. At once, a Nanopositioning and Nanomeasuring Machine with sub-nanometre resolution in combination with a measuring range of several millimetres enables multiscale measurement strategies. Because of different capabilities of divers optical probes among each other, but also of tactile and atomic force sensors a multisensor approach provide exceptional advantages in micro/nano measurement technology.